Cold FE-SEM | 저온주사전자현미경
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | S-4800 | ||
| 제조사 | Hitachi High-Technologies | ||
| 담당자 | 이경애 | ||
| 연락처 | 052-217-4163 / [email protected] | ||
| 예약 가능여부 | 불가능 | ||
| 예약단위 | 0.5hr | 1일최대예약시간 | 2hr |
| 예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
| 장비위치 | 102동 B110호(Bldg.102, Room B110) | ||
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Description
SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.
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Specifications
• Electron gun
: cold cathode field emission electron source
• Resolution
- < 1.0 nm @15 kV
• Magnification
- LM 20 ~ 2,000 x, HM 100 ~ 800,000 x
• Accelerate voltage : 0.1 ~ 30 kV (0.1 kV/step)
• Electrical image shift : ± 12μm (WD = 8 mm)
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Applications
• Secondary electron image
• Energy dispersive spectroscopy (EDS)