Three Dimemsional Measurement | 비접촉 3차원 측정기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | NV-3000 | ||
| 제조사 | Nanosystem | ||
| 담당자 | 권강욱 | ||
| 연락처 | 052-217-4066 / kku1050@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 30분 | 1일최대예약시간 | 8시간 |
| 예약Open(~일 전) | 1주일 | 예약취소불가(~일 전) | 3시간 |
| 장비위치 | 107동 110호 (Bldg.107, Room.110) | ||
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Description
Probe system moves towards an optical axes at very small intervals of scores of nm. It inspects whether interference is generated from all pixels in image. height in an optional pixel point is set on a place where in terference signal is maximized, and by preforming this in pixel an entire image, this method produces three dimensional form.
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Specifications
• Interferometric objective : 5 lens available
• Scan range : 0 ~ 180μm (option 270μm, 5 mm)
• Vertical resolution : WSI < 0.5μm/PSI < 0.1μm
• Lateral resolution : 0.2 ~ 4μm
• Tip/tilt : ± 6 ° (probe tip/tilt)
• Workpiece stage :
- NV-P2020 / 200 x 200 mm (motorized)
- NV-P4050 / 400 x 500 mm (motorized)
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Applications
• 3D analysis of surface
• Semiconductor parts test
• Roughness average measurement