Ultra-Precision Nano Machine | 초정밀 나노가공기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | FANUC ROBONANO α - 0iB | ||
| 제조사 | FANUC | ||
| 담당자 | 권강욱 | ||
| 연락처 | 052-217-4066 / kku1050@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 3시간 | 1일최대예약시간 | 8시간 |
| 예약Open(~일 전) | 1주일 | 예약취소불가(~일 전) | 1일 |
| 장비위치 | 107동 106호 (Bldg.107,Room 106) | ||
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Description
Ultra-precision nano machine is combining nano servo technology with the newest linear motor and on same machine built in motor and air bearing technology, measures the slope by using rotation axes, and controls 5-axes (3 of linear curve axes : X, Y, Z and 2 of rotation axes : B, C) simultaneously. It is convenient to install spindles or manufacture materials in all tables, as its tables of rotation axes B and C have the same structure and function.
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Specifications
• Stroke - axes (X-Z-Y) : 280 x 150 x 40 mm - axes (B-C) : 360 °
• Command resolution - axes (X-Z-Y) : 1 nm - axes (B-C) : 0.000001 °
• Bearing type : Hydrostatic air bearing
• Milling spindle
- diameter of shank : Φ6 mm
- maximum rotation speed : 50,000 min-1
- size/mass : Φ74 x 84 mm/1.5 Kg
• Turning spindle
- diameter of shaft table : Φ72 mm
- maximum rotation speed : 7,000 min-1
- size/mass : Φ184 x 77 mm/4.8 Kg
• Nanochecker
- maximum measuring angle 3-axes : ± 60 ° / 5-axes : ± 90 °
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Applications
• Diffraction grating
• Prism groove
• Lens array
• Micro channel for Bio-chip
• Free curved surface
• Spherical process