4point-probe | 표면 저항 측정기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | CMT2000N | ||
| 제조사 | AIT | ||
| 담당자 | 이선진 | ||
| 연락처 | 052-217-4193 / sunee6210@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 30min | 1일최대예약시간 | 1hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
| 장비위치 | 108동 B101호 (Bldg.108, Room B101) | ||
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Description
Full automatic system measures sheet resistance and resistivity silicon wafer, metal, and solar cell, etc. This system can be operated by itself. Furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analysis.
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Specifications
• Measurement range : 1 mΩ/sq ~ 2 mΩ/sq
• Measurement accuracy : ± 0.5 % (standard resistor)
• Measurement pattern : ASTM, SEMI, customer design
• Data analysis : data map, contour & 3D mapping
• Measurement range : Ω, Ω/sq, Ω/cm
• Current source : 10 nA ~ 100 mA
• Voltage : 0 ~ 2,000 mV
• Substrate size : 200 mm (wafer) / 140 × 140 mm (square)
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Applications
• Sheet resistance measurement of thin film