Thickness measurement | 박막 두께 측정기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | ST4000-DLX | ||
| 제조사 | K-MAC | ||
| 담당자 | 이송희 | ||
| 연락처 | 052-217-4190 / lychle2@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 30min | 1일최대예약시간 | 1hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
| 장비위치 | 108동 B101호 (Bldg. 108, Room B101) | ||
-
Description
Some portion of the light that is incident on the thin film surface is reflected
from the upper surface of the sample, other portion is reflected from the
interfaces between the thin film and the substrate. -
Specifications
• Detector : used wavelength range is 400 ~ 800 nm
linear silicon CCD array (2048 pixel)
• Stage size : 300 mm x 300 mm (12 inch wafer)
• Lens : m 5 x, m10 x, m 50 x
• Spot size : 40μm, 20μm, 4μm
• Reflection probe : choose wavelength (300 ~ 800 nm)
• Thickness measurement range : 100 Å ~ 50μm
• Theoretical resolution : 1 nm
-
Applications
• Semiconductor : Poly-Si, GaAs, GaN, ZnS, SiGe, ONO, SOI, SiLk
• Dielectric material : SiO2, Si3N4, ITO, TiO2, ZrO2, BTS, HfO2
• Polymer : PVA, PET, PP, PR