Surface profiler | 박막 단차 측정기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | P6 | ||
| 제조사 | KLA Tencor | ||
| 담당자 | 이선진 | ||
| 연락처 | 052-217-4193 / sunee6210@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 30min | 1일최대예약시간 | 1hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
| 장비위치 | 108동 B101호 (Bldg. 108, Room B101) | ||
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Description
The P-6 stylus profiler and surface analysis system offers a combination of advanced features for process development and manufacturing control of scientific research, and other industrial metrology applications
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Specifications
• Single 2D & 3D scanning profiler
• 150 mm diameter vacuum & motorized sample stage or bigger
• Manual or auto theta sample stage
• Zoom optic : top view 185 ~ 750 or 115 ~ 465 x
• Automatic step detection and multiple cursor positioning
• Scan length : 150 mm
• CCTV zoom : top view 185 ~ 750 or 115 ~ 465 x
• Stylus force : adjustable between 1 ~ 15 mg
• L-stylus : 2 um radius 60 degree
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Applications
• MEMS / NANO device
• LEDs
• Storage device
• UV embossing / Nano imprint lithography