Photolitho_MDA400S | 미세패턴 정렬 노광기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | MDA-400S | ||
| 제조사 | MIDAS | ||
| 담당자 | 황은정 | ||
| 연락처 | 052-217-4192 / hej9204@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 30min | 1일최대예약시간 | 3hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
| 장비위치 | 108동 B101호 (Bldg.108, Room B101) | ||
-
Description
MDA-400S performs alignment and exposures by UV lamp on the wafer and substrates coated by Photo-resist through mask with alignment keys.
-
Specifications
• High efficiency & high accurate UV exposure system
• UV lamp : Hg 350 W
• UV 400 : 350 ~ 450 nm (I-, H-, G-line)
• Gap adjustment accuracy : 1μm
• Methods : top side alignment only
• Alignment accuracy : 1μm
• Microscope magnification : 90 x ~ 500 x
• Fully manual type system
-
Applications
• Micro scale patterning for semiconductor process
• MEMS / Nano device fabrication