Low Angle Ion Mill | 이온밀링기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | Model 1050 | ||
| 제조사 | E.A. Fischione Instruments, Inc. | ||
| 담당자 | 이경애 | ||
| 연락처 | 052-217-4163 / kalee@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 0.5hr | 1일최대예약시간 | 12hr |
| 예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
| 장비위치 | 102동 B122호 (Bldg.102, Room B122) | ||
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Description
Low angle ion mill is a machine fabricating a semiconductor and inorganic materials in the diameter of the disk-shaped 3mmφ thickness 50 ~ 80㎛ and create a sample for TEM analysis to several tens of nanometers thin by making the disk medium.
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Specifications
• Ion sources
- Two TrueFocus ion sources
- Variable energy (100 eV to 6.0 KeV) operation, continuously adjustable
- Beam current up to 10 mA/cm²
- Choice of single or dual ion source operation
• Specimen stage
- Milling angle range of -10 ° to +10 °
- 360 ° specimen rotation with motion sequencing
- Specimen rocking
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Applications
• TEM sample preparation