Advanced Plasma System | 플라즈마 시스템
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | Model 960 | ||
| 제조사 | Gatan | ||
| 담당자 | 임정환 | ||
| 연락처 | 052-217-4175 / jhwan0918@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 0.5hr | 1일최대예약시간 | 12hr |
| 예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
| 장비위치 | 102동 B106호 (Bldg.102, Room B106) | ||
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Description
A totally NEW advanced plasma cleaning system for removal of hydrocarbon contamination on TEM and SEM samples. Solarus is a new generation plasma system engineered on new concepts and the latest technology resulting in better performance, simplified use and consistent cleaning results. SOLARUS offers the most effective cleaning system.
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Specifications
• The full-time turbo drag pumping system speeds up the entire cleaning cycle.
• Typical run rates are less than 2 minutes for two TEM samples in TEM holders, versus up to 20 minutes for other plasma cleaners in the market.
• Pump down - 50 seconds vs. 3 minutes
• Cleaning rates 30 sec - 120 sec vs. 2min - 10min
• Venting - 5 seconds vs. 6 minutes
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Applications
• Enhanced imaging capability
• Improved accuracy when performing composition microanalysis
• Use of smaller probe size; a must for STEM and EELS analysis in a TEM/STEM