Quanta 3D FIB | 이온집속빔
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | Quanta 3D FEG | ||
| 제조사 | FEI | ||
| 담당자 | 이선이 | ||
| 연락처 | 052-217-4023 / ssun295@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 0.5hr | 1일최대예약시간 | 4hr |
| 예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
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Description
샘플 배송 주소
울산시 울주군 언양읍 유니스트길 50, 102동 201-5호
Dual-beam FIB has a multitude of capabilities including high resolution electron imaging, ion imaging, nano device fabrication, and material deposition. Simultaneous patterning and imaging are possible to nm resolution for both imaging and machining. FIB with both ion and electron beams enables highprecision cross-section processing and TEM/3DAP sample preparation -
Specifications
• Electron optics - Resolution
HV : 1.2 nm @30 kV
- Accelerating voltage : 1 kV ~ 30 kV
- Probe current : up to 200 nA
- Magnification : 30 x ~ 1,280 kx
• Ion optics - Resolution : 7 nm @30 kV
- Accelerating voltage : 2 ~ 30 kV
- Probe current : 1 pA ~ 65 nA
- Magnification : 40 x ~ 1,280 kx
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Applications
• Ultra high resolution electron, ion imaging
• TEM sample preparation
• Energy dispersive spectroscopy (EDS)
• EBSD image