보유장비

E-beam Evaporator(Temescal) | 전자빔 금속박막증착 장치

E-beam Evaporator(Temescal)
보유장비 관련 정보
연구실/분야
모델명 FC-2000
제조사 Temescal
담당자 김형일
연락처 052-217-4065 / hikim78@unist.ac.kr
예약 가능여부 가능
예약단위 1hr 1일최대예약시간 2hr
예약Open(~일 전) 2주전 예약취소불가(~일 전) 2hr
장비위치 108동 B101호(Bldg, 108, Room B101)
  • Description

    Electron beam source is shown by the power supply to the hot filament electron beam by the magnetic field induced by magnet.

  • Specifications

    • E-beam source assembly by Temescal in USA

    • 15 cc, 6 pocket (Au, Cr, Ni, Ti, Al, Pt, Pd)

    • Power supply : 6 kw (CV-6SLX)

    • Source control module (Temescal)

    • Substrate heat : 300 °C (4 kW)

    • Programmable sweep controller (Inficon)

    • Uniformity : less than ± 5 % within wafer

    less than ± 5 % wafer to wafer

  • Applications

    • Conventional materials coating

    • Lift off process

    • Metal electrode deposition on surfaces