E-beam Evaporator(Woosung) | 전자빔 금속박막증착 장치
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | WC-4000 | ||
| 제조사 | WOOSUNG Hi-vac | ||
| 담당자 | 김형일 | ||
| 연락처 | 052-217-4065 / hikim78@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 3hr | 1일최대예약시간 | 3hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
| 장비위치 | 108동 B101호 (Bldg.108, Room B101) | ||
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Description
Electron beam source is shown by the power supply to the hot filament electron beam by the magnetic field induced by magnet.
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Specifications
• E-beam source assembly by TELEMARK in USA
• 7 cc, 6 pocket (Au, Cr, Cu, Ni, Ti, Al, Pt, Pd)
• Power supply : 6 kW (SJ Power)
• Substrate Rotation Speed: 0 ~ 80 rpm
• Programmable sweep controller (Sycon)
• Uniformity : less than ± 5 % within wafer
less than ± 5 % wafer to wafer
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Applications
• Conventional materials coating
• Lift off process
• Metal electrode deposition on surfaces