Cryogenic Probe Station | 극저온탐침측정기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | CRX-4K | ||
| 제조사 | Lakeshore | ||
| 담당자 | 황은정 | ||
| 연락처 | 052-217-4192 / hej9204@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 1hr | 1일최대예약시간 | 24hr |
| 예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
| 장비위치 | 108동 B104호(Bldg.108, Room B104) | ||
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Description
A probe station is used to physically acquire signals from the internal nodes of a semiconductor device. If the device is being electrically stimulated, the signal is acquired by the mechanical probe and is displayed on an oscilloscope. This is a ver satile micro-manipulated probe station used for non-destructive testing of devices on full and partial wafers up to 2" in diameter.
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Specifications
• Temperature : 6 K ~ 340 K
• 4 micro-manipulated probe arms
• 4" wafer probe capabilities
• Cryogen-free CCR (closed cycle refrigerator)
• High vacuum to 10-7 torr
• Detector : KEITHLEY (4200-SCS)
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Applications
• Characterization of semiconductor device
• Measurement of I-V curve in temperature variation (6 K ~ 370 K)
• Measurement of 4 probe resistivity in temperature variation (6 K ~ 370 K)