4point-probe
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Description
Full automatic system measures sheet resistance and resistivity silicon wafer, metal, and solar cell, etc. This system can be operated by itself. Furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analysis.
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Specifications
• Measurement range : 1 mΩ/sq ~ 2 mΩ/sq
• Measurement accuracy : ± 0.5 % (standard resistor)
• Measurement pattern : ASTM, SEMI, customer design
• Data analysis : data map, contour & 3D mapping
• Measurement range : Ω, Ω/sq, Ω/cm
• Current source : 10 nA ~ 100 mA
• Voltage : 0 ~ 2,000 mV
• Substrate size : 200 mm (wafer) / 140 × 140 mm (square)
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Applications
• Sheet resistance measurement of thin film