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Education & Seminar

Nano Fabrication Center◈ 2026 Cleanroom Equipment training Schedule (10/12~10/16)

보유장비 관련 정보
Date
2026.10.09~2026.10.16
Place QN Fab Lecturer
Affiliation Host/Contact 김민재 / mjkim@unist.ac.kr/4064
Attached file

Course Title Time Place Limit Applicant
Mask aligner 목요일 16:00 QN Fab 3 3
Dicing saw 16:00 3 1
Ellipsometer 17:00 3 3
Evaporator 10:00 0 0
Sputter 10:00 3 3
PE CVD 13:00 3 1
LP CVD 14:00 0 0
Thermal ALD 15:00 3 3
Furnace 16:00 0 1
e-beam litho(attached) 10:00 3 1
Maskless laser litho 14:00 3 2
ICP etcher 10:00 3 3
Wet station 11:00 3 3
Surface profiler 15:00 3 2
PR stripper 16:00 3 0