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Education & Seminar

Nano Fabrication Center◎ 6th Cleanroom Equipment training schedule (JUNE, 2019)

보유장비 관련 정보
Date
2019.06.17~2019.06.20(6/18,19,20)
Place NSB B101 Cleanroom Lecturer
Affiliation Host/Contact / hae-ra Kang, haera@unist.ac.kr
Attached file

Course Title Time Place Limit Applicant
mandatory ↓ Select ↓ 18, 19, 20 (Tue, Wed, Thu) NSB B101 45 10
Photo lithography 18th/ Tue/ 10 : 00 NSB B101 5 5
DC&RF Sputter 19th/ Wed/ 9 : 30 NSB B101 5 0
ALD 19th/ Wed/ 11 : 00 NSB B101 5 1
PE CVD 19th/ Wed/ 14 : 00 NSB B101 5 3
Ellipsometer 19th/ Wed/ 15 : 00 NSB B101 5 3
Surface profiler 19th/ Wed/ 16 : 00 NSB B101 5 3
Dielectric&Metal RIE, ICP 20th/ Thu/ 10 : 00 NSB B101 5 4
PR asher 20th/ Thu/ 14 : 00 NSB B101 5 1
Wet station 20th/ Thu/ 15 : 00 NSB B101 5 4