• HOME
  • Participation Space
  • Education & Seminar

Education & Seminar

Nano Fabrication Center◈ 2026 Cleanroom Equipment training Schedule (9/28~10/2)

보유장비 관련 정보
Date
2026.09.25~2026.10.02
Place QN Fab Lecturer
Affiliation Host/Contact 김민재 / mjkim@unist.ac.kr/4064
Attached file

** ICP etcher training schedule has been changed from Fri 10:00 to Thu 10:00

Course Title Time Place Limit Applicant
Evaporator 10:00 QN Fab 3 2
Sputter 10:00 QN Fab 3 3
PE CVD 13:00 QN Fab 3 3
LP CVD 14:00 QN Fab 3 1
ALD 15:00 QN Fab 3 0
Furnace 16:00 QN Fab 3 0
e-beam litho(attached) 10:00 QN Fab 3 3
Maskless laser litho 14:00 QN Fab 3 3
ICP etcher 10:00 QN Fab 3 3
Wet station 11:00 QN Fab 3 3
Surface profiler 15:00 QN Fab 3 2
PR stripper 16:00 QN Fab 3 2