• HOME
  • Participation Space
  • Education & Seminar

Education & Seminar

Nano Fabrication Center◈ 2026 Cleanroom Equipment training Schedule (3/23 ~ 3/27)

보유장비 관련 정보
Date
2026.03.21~2026.03.27
Place 108동 B101호 Lecturer
Affiliation Host/Contact 김민재 / mjkim@unist.ac.kr / 4064
Attached file

Course Title Time Place Limit Applicant
Mask aligner 14:00~16:00 108동 B101호 3 2
Dicing saw 16:00~17:00 108동 B101호 3 3
Ellipsometer 17:00~18:00 108동 B101호 3 3
Evaporator 10:00~12:00 108동 B101호 3 0
Sputter 10:00~12:00 108동 B101호 3 3
PE CVD 13:00~14:00 108동 B101호 3 3
LP CVD 14:00~15:00 108동 B101호 3 1
Thermal ALD 15:00~16:00 108동 B101호 3 2
Furnace 16:00~17:00 108동 B101호 3 1
e-beam litho(attached) 10:00~12:00 108동 B101호 3 1
Maskless laser writer 14:00~16:00 108동 B101호 3 1
Dry etcher 10:00~11:00 108동 B101호 3 0
Wet station 11:00~12:00 108동 B101호 3 3
Surface profiler 15:00~16:00 108동 B101호 3 1
PR Stripper 16:00~17:00 108동 B101호 3 1