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Nano Fabrication Center◈ 2026 Cleanroom Equipment training Schedule (2/9 ~ 2/13)

보유장비 관련 정보
Date
2026.02.07~2026.02.13
Place 108동 B101호 Lecturer
Affiliation Host/Contact 김민재 / mjkim@unist.ac.kr / 4064
Attached file

e-beam litho training session is canceled because of the machine breakdown.

Course Title Time Place Limit Applicant
Mask aligner 14:00~16:00 108동 B101호 3 0
Dicing saw 16:00~17:00 108동 B101호 3 1
Ellipsometer 17:00~18:00 108동 B101호 3 2
Evaporator 10:00~12:00 108동 B101호 3 1
Sputter 10:00~12:00 108동 B101호 3 1
PE CVD 13:00~14:00 108동 B101호 3 0
LP CVD 14:00~15:00 108동 B101호 3 0
Thermal ALD 15:00~16:00 108동 B101호 3 2
Furnace 16:00~17:00 108동 B101호 3 1
- - - 3 0
Maskless laser writer 14:00~16:00 108동 B101호 3 2
Dry etcher 10:00~11:00 108동 B101호 3 2
Wet station 11:00~12:00 108동 B101호 3 2
Surface profiler 15:00~16:00 108동 B101호 3 2
PR Stripper 16:00~17:00 108동 B101호 3 1