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Nano Fabrication Center◈ 2026 Cleanroom Equipment training Schedule (10/5~10/9)

보유장비 관련 정보
Date
2026.10.02~2026.10.09
Place QN Fab Lecturer
Affiliation Host/Contact 김민재 / mjkim@unist.ac.kr/4064
Attached file

Course Title Time Place Limit Applicant
Evaporator 10:00 QN Fab 0 0
Sputter 10:00 QN Fab 3 3
PE CVD 13:00 QN Fab 3 1
LP CVD 14:00 QN Fab 3 0
ALD 15:00 QN Fab 3 0
Furnace 16:00 QN Fab 3 0
e-beam litho(attached) 10:00 QN Fab 3 1
Maskless laser litho 14:00 QN Fab 3 3