• HOME
  • Participation Space
  • Education & Seminar

Education & Seminar

Nano Fabrication Center◈ 2026 Cleanroom Equipment training Schedule (7/13~ 7/17)

보유장비 관련 정보
Date
2026.07.10~2026.07.17
Place 108동 B101호 Lecturer
Affiliation Host/Contact 김민재 / mjkim@unist.ac.kr / 4064
Attached file

e-beam litho(attached) is canceled due to the instructor’s vacation.

Course Title Time Place Limit Applicant
Mask aligner 14:00~16:00 108동 B101호 3 2
Dicing saw 16:00~17:00 108동 B101호 3 0
Ellipsometer 17:00~18:00 108동 B101호 3 0
Evaporator 10:00~12:00 108동 B101호 3 1
Sputter 10:00~12:00 108동 B101호 3 1
PE CVD 13:00~14:00 108동 B101호 3 1
LP CVD 14:00~15:00 108동 B101호 3 0
Thermal ALD 15:00~16:00 108동 B101호 3 0
Furnace 16:00~17:00 108동 B101호 3 0
- - - - 0
Maskless laser writer 14:00~16:00 108동 B101호 3 0