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Education & Seminar

Nano Fabrication Center◎ 5th Cleanroom Equipment training schedule (MAY, 2019)

보유장비 관련 정보
Date
2019.05.20~2019.05.23(5/21-23)
Place NSB B101 Cleanroom Lecturer
Affiliation Host/Contact / hae-ra Kang, haera@unist.ac.kr
Attached file

Course Title Time Place Limit Applicant
mandatory 2019 5th - - 50 15
Safety training 7th/ Tue/ 10 : 00 NSB B101 0 5
Safety training (★Only for the international students) 7th/ Tue/ 14 : 00 NSB B101 0 1
Photo lithography 21st/ Tue/ 10 : 00 NSB B101 5 5
DC & RF Sputter 22nd/ Wed/ 09 : 30 NSB B101 5 2
ALD (Not working) - NSB B101 0 1
PECVD 22nd/ Wed/ 14 : 00 NSB B101 5 1
Ellipsometer 22nd/ Wed/ 15 : 00 NSB B101 5 0
Surface profiler 22nd/ Wed/ 16 : 00 NSB B101 5 1
Dielectric/ Metal RIE, ICP 23rd/ Thu/ 10 : 00 NSB B101 5 4
PR asher 23rd/ Thu/ 14 : 00 NSB B101 5 1
Wet station 23rd/ Thu/ 15 : 00 NSB B101 5 1