보유장비

Nano Mill | 나노밀

Nano Mill
보유장비 관련 정보
연구실/분야
모델명 Model 1040
제조사 E.A. Fischione instruments, Inc
담당자 임정환
연락처 052-217-4175 / jhwan0918@unist.ac.kr
예약 가능여부 가능
예약단위 0.5hr 1일최대예약시간 12hr
예약Open(~일 전) 5days 예약취소불가(~일 전) 2hr
장비위치 102동 B115호 (Bldg.102, Room B115)
  • Description

    The NanoMill TEM specimen preparation system is ideal for specimen processing following FIB milling. The NanoMill system’s concentrated argon ion beam, typically in the energy range of 50
    to 2000 eV, excels at targeted milling and specimen surface damage removal. Ioninduced secondary electron imaging is used to locate the FIB-produced lamella and then to target the region that will receive low energy milling in either raster or spot modes.

  • Specifications

    • Voltage: 50 eV to 2 kV

    • Beam current density up to 1 mA/cm2

    • Beam diameter as small as 1 µm at 2,000 eV

    • Milling angle range of −10 to +30°

    • System base vacuum of 3 x 10-7 mbar

    • Operating vacuum of 1 x 10-4 mbar

    • Gas flow rate up to 2 sccm

  • Applications

    • TEM sample preparation