Nano Imprinter | 나노임프린트 묘화시스템
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | ANT-6HR | ||
| 제조사 | KIMM | ||
| 담당자 | 김민재 | ||
| 연락처 | 052-217-4064 / [email protected] | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 1hr | 1일최대예약시간 | 3hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
| 장비위치 | 108동 B101호 (Bldg. 108, Room B101) | ||
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Description
Nano-Imprint fundamental principle is to transfer the master patterns defined in the stamp to deformable materials such as Photo-resist spun on substrate by mechanical press.
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Specifications
• Curing type : UV, thermal, UV & thermal
• Imprint area : ~ 6 inch
• Stamp : Quartz, Si, Ni, PDMS, PMMA, etc.
• Imprint Pressure : ≤ 2 bar (UV), ≤ 60 bar (Thermal)
• UV System : ~ 50 mw/cm2, 2 Kw
• Temperature : RT ~ 250 °C
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Applications
• Nanostructure device imprint fabrication
• Functional device chemical & bio sensor