보유장비

Low Angle Ion Mill | 이온밀링기

Low Angle Ion Mill
보유장비 관련 정보
연구실/분야
모델명 Model 1050
제조사 E.A. Fischione Instruments, Inc.
담당자 이경애
연락처 052-217-4163 / kalee@unist.ac.kr
예약 가능여부 가능
예약단위 0.5hr 1일최대예약시간 12hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
장비위치 102동 B122호 (Bldg.102, Room B122)
  • Description

    Low angle ion mill is a machine fabricating a semiconductor and inorganic materials in the diameter of the disk-shaped 3mmφ thickness 50 ~ 80㎛ and create a sample for TEM analysis to several tens of nanometers thin by making the disk medium.

  • Specifications

    • Ion sources

    - Two TrueFocus ion sources

    - Variable energy (100 eV to 6.0 KeV) operation, continuously adjustable

    - Beam current up to 10 mA/cm²

    - Choice of single or dual ion source operation

    • Specimen stage

    - Milling angle range of -10 ° to +10 °

    - 360 ° specimen rotation with motion sequencing

    - Specimen rocking

  • Applications

    • TEM sample preparation