SU8220 Cold FE-SEM | 저온전계방출형주사전자현미경
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | SU8220 | ||
| 제조사 | Hitachi High-Technologies | ||
| 담당자 | 이경애 | ||
| 연락처 | 052-217-4163 / [email protected] | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 0.5hr | 1일최대예약시간 | 2hr |
| 예약Open(~일 전) | 5일전 | 예약취소불가(~일 전) | 2시간전 |
| 장비위치 | 102동 B115호 (Bldg.102, Room B115) | ||
-
Description
• 초고분해능 이미징
• EDS 가능
• Fee
- UNIST: 54,600 won/hr, Self-user: 39,000 won/hr
- Client: 78,000 won/hr, University: 70,200 won/hr, Enterprise out of Ulsan: 93,600 won/hr
• Description
SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun. -
Specifications
• Resolution : 0.8nm at 15kV, 1.1nm at 1kV (Deaceleration mode)
• Magnification : LM 20 ~ 2,000X, HM 100 ~ 800,000X
• Accelerate Voltage : 0.1 ~ 30kV(0.1kV/step)
• Detector : SE, HA-BSE, LA-BSE, EDS
• Electrical image shift : ±12㎛(WD=8mm)
• Electron gun : cold cathode field emission electron source
• Contamination Prevention : Anti-contamination trap
• Traverse : XY axis 50mm X 50mm
* EDS
- Manufacturing company: AMETEK EDAX
- Model: OCTANE PLUS
- Active area: 30mm^2
-
Applications
• Secondary electron image
• Energy dispersive spectroscopy (EDS)