SAM coater | 기상 자기조립 박막 증착기
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | AVC-150 | ||
| 제조사 | SORONA | ||
| 담당자 | 강해라 | ||
| 연락처 | 052-217-4167 / haera@unist.ac.kr | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 2hr | 1일최대예약시간 | 2hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
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Description
This machine can grow polymer mono-layer with very solid bonding force by forming O-H layer by natural oxygen on sample and supplied polymer source from vaporizer.
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Specifications
• Contact angle : 5 ˚ ~ 110 ˚ (water)
• Work of adhesion : 3 ~ 100 uJ/m2
• Wafer sample size : ≤ 300 mm
• Precursor usage :
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Applications
• Nano patterning of bio devices by imprinting & display panel by imprinting
• Polymer memory device by imprinting