보유장비

SU8220 Cold FE-SEM | 저온전계방출형주사전자현미경

SU8220 Cold FE-SEM
보유장비 관련 정보
연구실/분야
모델명 SU8220
제조사 Hitachi High-Technologies
담당자 이경애
연락처 052-217-4163 / [email protected]
예약 가능여부 가능
예약단위 0.5hr 1일최대예약시간 2hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
장비위치 102동 B115호 (Bldg.102, Room B115)
  • Description

    • SEM Self-user training
    - SU7000 FE-SEM: 1/3~4, 3/7~8, 5/2~3, 6/27~28, 8/22~23, 10/31~11/1
    - Nano FE-SEM: 1/17~18, 3/21~22, 5/16~17, 7/11~12, 9/5~6, 11/14~16
    - Quanta FE-SEM: 2/7~8, 4/4~5, 5/30~31, 7/25~26, 9/19~20, 11/28~29
    - SU8220 Cold FE-SEM: 2/21~22, 4/18~19
    - Cold FE-SEM: 6/13~14, 8/8~9, 10/17~18, 12/12~13
    Please apply at UCRF website 2 weeks before the training date.

    • Fee
    - UNIST: 54,600 won/hr, Self-user: 39,000 won/hr
    - Client: 78,000 won/hr, University: 70,200 won/hr, Enterprise out of Ulsan: 93,600 won/hr

    • Description
    SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.

  • Specifications

    • Resolution : 0.8nm at 15kV, 1.1nm at 1kV (Deaceleration mode)

    • Magnification : LM 20 ~ 2,000X, HM 100 ~ 800,000X

    • Accelerate Voltage : 0.1 ~ 30kV(0.1kV/step)

    • Detector : SE, HA-BSE, LA-BSE, EDS

    • Electrical image shift : ±12㎛(WD=8mm)

    • Electron gun : cold cathode field emission electron source

    • Contamination Prevention : Anti-contamination trap

    • Traverse : XY axis 50mm X 50mm

    * EDS

    - Manufacturing company: AMETEK EDAX

    - Model: OCTANE PLUS

    - Active area: 30mm^2

  • Applications

    • Secondary electron image

    • Energy dispersive spectroscopy (EDS)