보유장비

Quanta200 FE-SEM | 전계방출형주사전자현미경

Quanta200 FE-SEM
보유장비 관련 정보
연구실/분야
모델명 Quanta 200FEG
제조사 FEI
담당자 이경애
연락처 052-217-4163 / [email protected]
예약 가능여부 가능
예약단위 0.5hr 1일최대예약시간 2hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
장비위치 102동 B110호(Bldg.102, Room B110)
  • Description

    • SEM Self-user training
    - SU7000 FE-SEM: 1/3~4, 3/7~8, 5/2~3, 6/27~28, 8/22~23, 10/31~11/1
    - Nano FE-SEM: 1/17~18, 3/21~22, 5/16~17, 7/11~12, 9/5~6, 11/14~16
    - Quanta FE-SEM: 2/7~8, 4/4~5, 5/30~31, 7/25~26, 9/19~20, 11/28~29
    - SU8220 Cold FE-SEM: 2/21~22, 4/18~19
    - Cold FE-SEM: 6/13~14, 8/8~9, 10/17~18, 12/12~13

    Please apply at UCRF website 2 weeks before the training date.

    • Fee
    - UNIST: 35,000 won/hr, Self-user: 25,000 won/hr
    - Client: 50,000 won/hr, University: 45,000 won/hr, Enterprise out of Ulsan: 60,000 won/hr

    • Description
    SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.

  • Specifications

    • Electron gun

    : Schottky type thermal FE gun

    • Resolution

    - < 1.2 nm @30 kV high vacuum mode

    - < 1.5 nm @30 kV low vacuum mode

    - < 1.5 nm @30 kV ESEM mode

    • Beam current : > 100 nA

    • Heating stage (1,500 ˚C)

    • Cooling stage (-20 ˚C)

  • Applications

    • High vacuum mode

    • Low vacuum mode (10 to 130 Pa)

    • ESEM mode (10 to 4,000 Pa)