SAM coater | 기상 자기조립 박막 증착기
This machine can grow polymer mono-layer with very solid bonding force by forming O-H layer by natural oxygen on sample and supplied polymer source from vaporizer.
• Contact angle : 5 ˚ ~ 110 ˚ (water)
• Work of adhesion : 3 ~ 100 uJ/m2
• Wafer sample size : ≤ 300 mm
• Precursor usage :
• Nano patterning of bio devices by imprinting & display panel by imprinting
• Polymer memory device by imprinting