Parylene Coater | 페럴린 증착장치
| 연구실/분야 | |||
|---|---|---|---|
| 모델명 | - | ||
| 제조사 | Alpha plus | ||
| 담당자 | 김형일 | ||
| 연락처 | 052-217-4065 / [email protected] | ||
| 예약 가능여부 | 가능 | ||
| 예약단위 | 4hr | 1일최대예약시간 | 4hr |
| 예약Open(~일 전) | 2주전 | 예약취소불가(~일 전) | 2hr |
| 장비위치 | 108동 B101호(Bldg, 108, Room B101) | ||
-
Description
The Dimer is inserted into the vaporizer in the powder form and evaporated between 120 - 175 °C Furnace chamber heated to approximately 650 - 690 degrees through the monomer which is converted to the substrate. After the process, the temperature is recovered to room temperature, creating a Poly-para-Xylylene film coating.
-
Specifications
• Dimer type : c
• Deposition rate : over 1-2 um/hr
• Substrate size : max. dia. 200 mm
• Process temperature - furnace (R/T to 1000 °C ± °C)
- /Vaporizer (R/T to 300 °C ± 3 °C)
• Thickness variation : less than ± 10 % within wafer
-
Applications
• MEMS / NANO Device
• SAW filters
• UV embossing / Nano imprint lithography
• Telecommunication devices