보유장비

4point-probe | 표면 저항 측정기

4point-probe
보유장비 관련 정보
연구실/분야
모델명 CMT2000N
제조사 AIT
담당자 김강오
연락처 052-217-4182 / ko8809@unist.ac.kr
예약 가능여부 가능
예약단위 30min 1일최대예약시간 1hr
예약Open(~일 전) 2주전 예약취소불가(~일 전) 2hr
장비위치 108동 B101호 (Bldg.108, Room B101)
  • Description

    Full automatic system measures sheet resistance and resistivity silicon wafer, metal, and solar cell, etc. This system can be operated by itself. Furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analysis.

  • Specifications

    • Measurement range : 1 mΩ/sq ~ 2 mΩ/sq

    • Measurement accuracy : ± 0.5 % (standard resistor)

    • Measurement pattern : ASTM, SEMI, customer design

    • Data analysis : data map, contour & 3D mapping

    • Measurement range : Ω, Ω/sq, Ω/cm

    • Current source : 10 nA ~ 100 mA

    • Voltage : 0 ~ 2,000 mV

    • Substrate size : 200 mm (wafer) / 140 × 140 mm (square)

  • Applications

    • Sheet resistance measurement of thin film