보유장비

Advanced Plasma System | 플라즈마 시스템

Advanced Plasma System
보유장비 관련 정보
연구실/분야
모델명 Model 960
제조사 Gatan
담당자 이경애
연락처 052-217-4163 / kalee@unist.ac.kr
예약 가능여부 가능
예약단위 0.5hr 1일최대예약시간 12hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
장비위치 102동 B106호 (Bldg.102, Room B106)
  • Description

    A totally NEW advanced plasma cleaning system for removal of hydrocarbon contamination on TEM and SEM samples. Solarus is a new generation plasma system engineered on new concepts and the latest technology resulting in better performance, simplified use and consistent cleaning results. SOLARUS offers the most effective cleaning system.

  • Specifications

    • The full-time turbo drag pumping system speeds up the entire cleaning cycle.

    • Typical run rates are less than 2 minutes for two TEM samples in TEM holders, versus up to 20 minutes for other plasma cleaners in the market.

    • Pump down - 50 seconds vs. 3 minutes

    • Cleaning rates 30 sec - 120 sec vs. 2min - 10min

    • Venting - 5 seconds vs. 6 minutes

  • Applications

    • Enhanced imaging capability

    • Improved accuracy when performing composition microanalysis

    • Use of smaller probe size; a must for STEM and EELS analysis in a TEM/STEM