보유장비

Cold FE-SEM | 저온주사전자현미경

Cold FE-SEM
보유장비 관련 정보
연구실/분야
모델명 S-4800
제조사 Hitachi High-Technologies
담당자 이경애
연락처 052-217-4163 / [email protected]
예약 가능여부 불가능
예약단위 0.5hr 1일최대예약시간 2hr
예약Open(~일 전) 5일전 예약취소불가(~일 전) 2시간전
장비위치 102동 B110호(Bldg.102, Room B110)
  • Description

    * Cold FE-SEM is out of order. The date of repair is on 30th, May.

    • SEM Self-user training
    - SU7000 FE-SEM: 1/3~4, 3/7~8, 5/2~3, 6/27~28, 8/22~23, 10/31~11/1
    - Nano FE-SEM: 1/17~18, 3/21~22, 5/16~17, 7/11~12, 10/17~18, 12/12~13
    - Quanta FE-SEM: 2/7~8, 4/4~5, 5/30~31, 7/25~26, 9/19~20, 11/28~29
    - SU8220 Cold FE-SEM: 2/21~22, 4/18~19, 6/13~14
    - Cold FE-SEM: 8/8~9, 9/5~6, 11/14~16

    Please apply on the UCRF website at 9:00 am two weeks before the training day. [UCRF webpage]-[Participation space]-[Education & Seminar]

    • Fee
    - UNIST: 42,000 won/hr, Self-user: 30,000 won/hr
    - Client: 60,000 won/hr, University: 54,000 won/hr, Enterprise out of Ulsan: 72,000 won/hr

    • Description
    SEM is a microscope that uses electrons instead of light to form an image. The SEM uses electromagnets rather than lenses, the researcher has much more control in the degree of magnification. Field-emission scanning electron microscope provides ultra high resolution image down to 1 nm resolution thanks to the inherent brightness of field–emission electron gun.

  • Specifications

    • Electron gun

    : cold cathode field emission electron source

    • Resolution

    - < 1.0 nm @15 kV

    • Magnification

    - LM 20 ~ 2,000 x, HM 100 ~ 800,000 x

    • Accelerate voltage : 0.1 ~ 30 kV (0.1 kV/step)

    • Electrical image shift : ± 12μm (WD = 8 mm)

  • Applications

    • Secondary electron image

    • Energy dispersive spectroscopy (EDS)