이름 | 모델 | 장비이용의뢰서/예약하기 |
---|---|---|
4point-probe | 표면 저항 측정기 / CMT2000NEquipment location : 108동 B101호 (Bldg.108, Room B101) |
Request of Analysis Reservation | |
contact angle | 접촉각 측정기 / Phoenix 300Equipment location : 108동 B104호(Bldg.108, Room B104) |
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Cryogenic Probe Station | 극저온탐침측정기 / CRX-4KEquipment location : 108동 B104호(Bldg.108, Room B104) |
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Dicing Saw | 기판 절단장치 / AR06DMEquipment location : 108동 B101호 (Bldg. 108, Room B101) |
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Ellipsometer | 박막 두께 측정기 / Elli-SE-UaM8Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
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Inspection Microscope | 반도체 검사용 현미경 / DM 4000MEquipment location : 108동 B101호 (Bldg. 108, Room B101) |
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Measurement Microscope | 측정용 현미경 / Axio Scope A1Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
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Normal SEM | 주사전자현미경 / S-3400N(Type Ⅱ)Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
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Optical Surface Profiler (비접촉식 표면 및 단차 측정기기) | Optical Surface Profiler (비접촉식 표면 및 단차 측정기기) / MicroXAM-800Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
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Surface profiler | 박막 단차 측정기 / P6Equipment location : 108동 B101호 (Bldg. 108, Room B101) |
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