TOF-SIMS | 비행시간형이차이온질량분석기

보유장비 관련 정보
Model TOF-SIMS 5
Technician Kyung-sun Lee
Contact 052-217-4036 /
Status for Reservation 가능
Reservation Unit 0.5hr Maximum Time (per day) 24hr
Open(~ago) 5일전 Cancel (~ago) 1시간전
  • Description

    Secondary ion mass spectrometry (SIMS) is a technique to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions. Time-of-flight (TOF) is a method of mass spectrometry in which ions are accelerated by an electric field of known strength. The velocity of the ion depends on the mass-to-charge ratio. The time that it subsequently takes for the particle to reach a detector at a known distance is measured. This time will depend on the mass-to-charge ratio of the particle (heavier particles reach lower speeds).

  • Specifications

    • Mass resolution (@29 amu) : > 10,000 (for Bi+)

    • Sensitivity (@29 amu) : > 3 x 10 - 8 Al+/nC

    • Mass range : > 9,000 amu

    • Base pressure : < 5.0 x 10-10 torr

    • A self-adjusting charge compensation system

    • Primary source : pulsed Bi cluster ion source

    • O2 and Cs dual sources for depth profiling

    • A motorized five-axes UHV sample stage

    • Two CCD high resolution video cameras

  • Applications

    • Analysis of molecular structrue

    • Analysis of trace elements (including H, He)

    • Chemical mapping (SIMS imaging)

    • Depth profiling and 3D analysis