Equipment

SAM coater | 기상 자기조립 박막 증착기

보유장비 관련 정보
Laboratory/Field
Model AVC-150
Maker SORONA
Technician Hae-ra Kang
Contact 052-217-4167 / haera@unist.ac.kr
Status for Reservation 가능
Reservation Unit 2hr Maximum Time (per day) 2hr
Open(~ago) 2주전 Cancel (~ago) 2hr
  • Description

    This machine can grow polymer mono-layer with very solid bonding force by forming O-H layer by natural oxygen on sample and supplied polymer source from vaporizer.

  • Specifications

    • Contact angle : 5 ˚ ~ 110 ˚ (water)

    • Work of adhesion : 3 ~ 100 uJ/m2

    • Wafer sample size : ≤ 300 mm

    • Precursor usage :

  • Applications

    • Nano patterning of bio devices by imprinting & display panel by imprinting

    • Polymer memory device by imprinting