SAM coater | 기상 자기조립 박막 증착기
| Laboratory/Field | |||
|---|---|---|---|
| Model | AVC-150 | ||
| Maker | SORONA | ||
| Technician | Hae-ra Kang | ||
| Contact | 052-217-4167 / haera@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 2hr | Maximum Time (per day) | 2hr |
| Open(~ago) | 2주전 | Cancel (~ago) | 2hr |
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Description
This machine can grow polymer mono-layer with very solid bonding force by forming O-H layer by natural oxygen on sample and supplied polymer source from vaporizer.
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Specifications
• Contact angle : 5 ˚ ~ 110 ˚ (water)
• Work of adhesion : 3 ~ 100 uJ/m2
• Wafer sample size : ≤ 300 mm
• Precursor usage :
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Applications
• Nano patterning of bio devices by imprinting & display panel by imprinting
• Polymer memory device by imprinting