PECS | 고해상도코팅기
PECS is the ideal instrument for application requiring sample cleaning or etching followed by high-resolution sputter coating.
• Ion guns : One penning ion guns
• Ion beam energy : 1.0 keV to 10.0keV
• Etched area : About 7mm - 10mm dependent on gun energy
• Sample rotation : Varible speed 10 -60 rpm
• SEM sample coating and etching