Equipment

PECS | 고해상도코팅기

보유장비 관련 정보
Laboratory/Field
Model Gatan model 682
Maker Gatan
Technician Ji Hyun Park
Contact 052-217-4177 / jihyun9067@unist.ac.kr
Status for Reservation 가능
Reservation Unit Maximum Time (per day)
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  • Description

    PECS is the ideal instrument for application requiring sample cleaning or etching followed by high-resolution sputter coating.

  • Specifications

    • Ion guns : One penning ion guns

    • Ion beam energy : 1.0 keV to 10.0keV

    • Etched area : About 7mm - 10mm dependent on gun energy

    • Sample rotation : Varible speed 10 -60 rpm

  • Applications

    • SEM sample coating and etching