Parylene Coater | 페럴린 증착장치
| Laboratory/Field | |||
|---|---|---|---|
| Model | - | ||
| Maker | Alpha plus | ||
| Technician | Hyung Il Kim | ||
| Contact | 052-217-4065 / hikim78@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 4hr | Maximum Time (per day) | 4hr |
| Open(~ago) | 2주전 | Cancel (~ago) | 2hr |
| Equipment location | 108동 B101호(Bldg, 108, Room B101) | ||
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Description
The Dimer is inserted into the vaporizer in the powder form and evaporated between 120 - 175 °C Furnace chamber heated to approximately 650 - 690 degrees through the monomer which is converted to the substrate. After the process, the temperature is recovered to room temperature, creating a Poly-para-Xylylene film coating.
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Specifications
• Dimer type : c
• Deposition rate : over 1-2 um/hr
• Substrate size : max. dia. 200 mm
• Process temperature - furnace (R/T to 1000 °C ± °C)
- /Vaporizer (R/T to 300 °C ± 3 °C)
• Thickness variation : less than ± 10 % within wafer
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Applications
• MEMS / NANO Device
• SAW filters
• UV embossing / Nano imprint lithography
• Telecommunication devices