Equipment

Nano Imprinter | 나노임프린트 묘화시스템

보유장비 관련 정보
Laboratory/Field
Model ANT-6HR
Maker KIMM
Technician Min-jae Kim
Contact 052-217-4064 / mjkim@unist.ac.kr
Status for Reservation 가능
Reservation Unit 1hr Maximum Time (per day) 3hr
Open(~ago) 2주전 Cancel (~ago) 2hr
  • Description

    Nano-Imprint fundamental principle is to transfer the master patterns defined in the stamp to deformable materials such as Photo-resist spun on substrate by mechanical press.

  • Specifications

    • Curing type : UV, thermal, UV & thermal

    • Imprint area : ~ 6 inch

    • Stamp : Quartz, Si, Ni, PDMS, PMMA, etc.

    • Imprint Pressure : ≤ 2 bar (UV), ≤ 60 bar (Thermal)

    • UV System : ~ 50 mw/cm2, 2 Kw

    • Temperature : RT ~ 250 °C

  • Applications

    • Nanostructure device imprint fabrication

    • Functional device chemical & bio sensor