Equipment

Metal RIE | 메탈 건식 식각장치

보유장비 관련 정보
Laboratory/Field
Model Labstar
Maker TTL
Technician Kang O Kim
Contact 052-217-4182 / ko8809@unist.ac.kr
Status for Reservation 가능
Reservation Unit 1hr Maximum Time (per day) 1hr
Open(~ago) 2주전 Cancel (~ago) 2hr
Equipment location 108동 B101호 (Bldg. 108, Room B101)
  • Description

    Metal RIE is an ion etching system for metal (Al, Ti, Cr, W, and Au) pattern formation.

  • Specifications

    • RF Power : Max. 500W

    • Pressure : 0~1000 mTorr

    • Gas : Cl2, SF6, Ar, O2

    • Sample : Max. 6 inch

    • Chiller : 15 degree

  • Applications

    • Dry etching process for metal layer (Al, W, Ti, and Cr)