Equipment

Low Angle Ion Mill | 이온 밀링

보유장비 관련 정보
Laboratory/Field
Model Model 1050
Maker E.A. Fischione Instruments, Inc.
Technician Gyeong Ae Lee
Contact 052-217-4163 / kalee@unist.ac.kr
Status for Reservation 가능
Reservation Unit 0.5hr Maximum Time (per day) 12hr
Open(~ago) 5일전 Cancel (~ago) 2시간전
  • Description

    Low angle ion mill is a machine fabricating a semiconductor and inorganic materials in the diameter of the disk-shaped 3mmφ thickness 50 ~ 80㎛ and create a sample for TEM analysis to several tens of nanometers thin by making the disk medium.

  • Specifications

    • Ion sources

    - Two TrueFocus ion sources

    - Variable energy (100 eV to 6.0 KeV) operation, continuously adjustable

    - Beam current up to 10 mA/cm²

    - Choice of single or dual ion source operation

    • Specimen stage

    - Milling angle range of -10 ° to +10 °

    - 360 ° specimen rotation with motion sequencing

    - Specimen rocking

  • Applications

    • TEM sample preparation