Advanced Plasma System | 플라즈마 시스템
| Laboratory/Field | |||
|---|---|---|---|
| Model | Model 960 | ||
| Maker | Gatan | ||
| Technician | Jeong-hwan Lim | ||
| Contact | 052-217-4175 / jhwan0918@unist.ac.kr | ||
| Status for Reservation | 가능 | ||
| Reservation Unit | 0.5hr | Maximum Time (per day) | 12hr |
| Open(~ago) | 5일전 | Cancel (~ago) | 2시간전 |
| Equipment location | 102동 B106호 (Bldg.102, Room B106) | ||
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Description
A totally NEW advanced plasma cleaning system for removal of hydrocarbon contamination on TEM and SEM samples. Solarus is a new generation plasma system engineered on new concepts and the latest technology resulting in better performance, simplified use and consistent cleaning results. SOLARUS offers the most effective cleaning system.
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Specifications
• The full-time turbo drag pumping system speeds up the entire cleaning cycle.
• Typical run rates are less than 2 minutes for two TEM samples in TEM holders, versus up to 20 minutes for other plasma cleaners in the market.
• Pump down - 50 seconds vs. 3 minutes
• Cleaning rates 30 sec - 120 sec vs. 2min - 10min
• Venting - 5 seconds vs. 6 minutes
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Applications
• Enhanced imaging capability
• Improved accuracy when performing composition microanalysis
• Use of smaller probe size; a must for STEM and EELS analysis in a TEM/STEM