Equipment

4point-probe | 표면 저항 측정기

보유장비 관련 정보
Laboratory/Field
Model CMT2000N
Maker AIT
Technician Kang O Kim
Contact 052-217-4182 / ko8809@unist.ac.kr
Status for Reservation 가능
Reservation Unit 30min Maximum Time (per day) 1hr
Open(~ago) 2주전 Cancel (~ago) 2hr
  • Description

    Full automatic system measures sheet resistance and resistivity silicon wafer, metal, and solar cell, etc. This system can be operated by itself. Furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analysis.

  • Specifications

    • Measurement range : 1 mΩ/sq ~ 2 mΩ/sq

    • Measurement accuracy : ± 0.5 % (standard resistor)

    • Measurement pattern : ASTM, SEMI, customer design

    • Data analysis : data map, contour & 3D mapping

    • Measurement range : Ω, Ω/sq, Ω/cm

    • Current source : 10 nA ~ 100 mA

    • Voltage : 0 ~ 2,000 mV

    • Substrate size : 200 mm (wafer) / 140 × 140 mm (square)

  • Applications

    • Sheet resistance measurement of thin film